Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories
848630Subheading
8486.30 — Machines and apparatus for the manufacture of flat panel displays:
Máy và thiết bị dùng để sản xuất màn hình dẹt:
Codes under heading 848630
- 84863010 - - Apparatus for dry etching patterns on flat panel display substrates
- 84863020 - - Apparatus for wet etching, developing, stripping or cleaning flat panel displays
- 84863030 - - Chemical vapour deposition apparatus for flat panel display production; spinners for coating photosensitive emulsions on flat panel display substrates; apparatus for physical deposition on flat panel display substrates
- 84863090 - - Other
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