8486 — Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories

Codes under heading 8486

• 848610 Machines and apparatus for the manufacture of boules or wafers:
• 84861010 Apparatus for rapid heating of semiconductor wafers
• 84861020 Spin dryers for semiconductor wafer processing
• 84861030 Machines for working any material by removal of material, by laser or other light or photon beam in the production of semiconductor wafers
• 84861040 Machines and apparatus for sawing monocrystal semiconductor boules into slices, or wafers into chips
• 84861050 Grinding, polishing and lapping machines for processing of semiconductor wafers
• 84861060 Apparatus for growing or pulling monocrystal semiconductor boules
• 84861090 Other
• 848620 Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits:
• Film formation equipment:
• 84862011 Chemical vapour deposition apparatus for semiconductor production
• 84862012 Epitaxial deposition machines for semiconductor wafers; spinners for coating photographic emulsions on semiconductor wafers
• 84862013 Apparatus for physical deposition by sputtering on semiconductor wafers; physical deposition apparatus for semiconductor production
• 84862019 Other
• Doping equipment:
• 84862021 Ion implanters for doping semiconductor materials
• 84862029 Other
• Etching and stripping equipment:
• 84862031 Deflash machines for cleaning and removing contaminants from the metal leads of semiconductor packages prior to the electroplating process; spraying appliances for etching, stripping or cleaning semiconductor wafers
• 84862032 Equipment for dry etching patterns on semiconductor materials
• 84862033 Apparatus for wet etching, developing, stripping or cleaning semiconductor wafers
• 84862039 Other
• Lithography equipment:
• 84862041 Direct write-on-wafer apparatus
• 84862042 Step and repeat aligners
• 84862049 Other
• Equipment for developing exposed wafers:
• 84862051 Dicing machines for scribing or scoring semiconductor wafers
• 84862059 Other
• Other:
• 84862091 Lasercutters for cutting contacting tracks in semiconductor production by laser beam
• 84862092 Machines for bending, folding and straightening semiconductor leads
• 84862093 Resistance heated furnaces and ovens for the manufacture of semiconductor devices on semiconductor wafers
• 84862094 Inductance or dielectric furnaces and ovens for the manufacture of semiconductor devices on semiconductor wafers
• 84862095 Automated machines for the placement or the removal of components or contact elements on semiconductor materials
• 84862099 Other
• 848630 Machines and apparatus for the manufacture of flat panel displays:
• 84863010 Apparatus for dry etching patterns on flat panel display substrates
• 84863020 Apparatus for wet etching, developing, stripping or cleaning flat panel displays
• 84863030 Chemical vapour deposition apparatus for flat panel display production; spinners for coating photosensitive emulsions on flat panel display substrates; apparatus for physical deposition on flat panel display substrates
• 84863090 Other
• 848640 Machines and apparatus specified in Note 11 (C) to this Chapter:
• 84864010 Focused ion beam milling machines to produce or repair masks and reticles for patterns on semiconductor devices
• 84864020 Die attach apparatus, tape automated bonders, wire bonders and encapsulation equipment for the assembly of semiconductors; automated machines for transport, handling and storage of semiconductor wafers, wafer cassettes, wafer boxes and other materials for semiconductor devices
• 84864030 Moulds for manufacture of semiconductor devices
• 84864040 Optical stereoscopic microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles
• 84864050 Photomicrographic microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles
• 84864060 Electron beam microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles
• 84864070 Pattern generating apparatus of a kind used for producing masks or reticles from photoresist coated substrates
• 84864090 Other
• 848690 Parts and accessories:
• Of machines and apparatus for the manufacture of boules or wafers:
• 84869011 Of apparatus for rapid heating of semiconductor wafers
• 84869012 Of spin dryers for semiconductor wafer processing
• 84869013 Of machines for working any material by removal of material, by laser or other light or photon beam in the production of semiconductor wafers
• Of machines for sawing monocrystal semiconductor boules into slices, or wafers into chips:
• 84869014 Tool holders and self-opening dieheads; work holders; dividing heads and other special attachments for machine-tools
• 84869015 Other
• 84869016 Of grinding, polishing and lapping machines for processing of semiconductor wafers
• 84869017 Of apparatus for growing or pulling monocrystal semiconductor boules
• 84869019 Other
• Of machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits:
• 84869021 Of chemical vapour deposition apparatus for semiconductor production
• 84869022 Of epitaxial deposition machines for semiconductor wafers; of spinners for coating photographic emulsions on semiconductor wafers
• 84869023 Of ion implanters for doping semiconductor materials; of apparatus for physical deposition by sputtering on semiconductor wafers; of physical deposition apparatus for semiconductor production; of direct write-on-wafer apparatus, step and repeat aligners and other lithography equipment
• Of spraying appliances for etching, stripping or cleaning semiconductor wafers; of apparatus for wet etching, developing, stripping or cleaning semiconductor wafers; of dry etching patterns on semiconductor materials:
• 84869024 Tool holders and self-opening dieheads; work holders; dividing heads and other special attachments for machine-tools
• 84869025 Other
• Of dicing machines for scribing or scoring semiconductor wafers; of lasercutters for cutting tracks in semiconductor production by laser beam; of machines for bending, folding and straightening semiconductor leads:
• 84869026 Tool holders and self-opening dieheads; workholders; dividing heads and other special attachments for machine-tools
• 84869027 Other
• 84869028 Of resistance heated furnaces and ovens for the manufacture of semiconductor devices on semiconductor wafers; of inductance or dielectric furnaces and ovens for the manufacture of semiconductor devices on semiconductor wafers
• 84869029 Other
• Of machines and apparatus for the manufacture of flat panel displays:
• 84869031 Of apparatus for dry etching patterns on flat panel display substrates
• Of apparatus for wet etching, developing, stripping or cleaning flat panel displays:
• 84869032 Tool holders and self-opening dieheads; work holders; dividing heads and other special attachments for machine-tools
• 84869033 Other
• 84869034 Of chemical vapour deposition apparatus for flat panel display production
• 84869035 Of spinners for coating photosensitive emulsions on flat panel display substrates
• 84869036 Of apparatus for physical deposition on flat panel display substrates
• 84869039 Other
• Of machines or apparatus specified in Note 11 (C) to this Chapter:
• 84869041 Of focused ion beam milling machines to produce or repair masks and reticles for patterns on semiconductor devices
• 84869042 Of die attach apparatus, tape automated bonders, wire bonders and of encapsulation equipment for assembly of semiconductors
• 84869043 Of automated machines for the transport, handling and storage of semiconductor wafers, wafer cassettes, wafer boxes and other materials for semiconductor devices
• 84869044 Of optical stereoscopic and photomicrographic microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles
• 84869045 Of electron beam microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles
• 84869046 Of pattern generating apparatus of a kind used for producing masks or reticles from photoresist coated substrates, including printed circuit assemblies
• 84869049 Other