8486.90 — Parts and accessories:

Codes under heading 848690

• Of machines and apparatus for the manufacture of boules or wafers:
• 84869011 Of apparatus for rapid heating of semiconductor wafers
• 84869012 Of spin dryers for semiconductor wafer processing
• 84869013 Of machines for working any material by removal of material, by laser or other light or photon beam in the production of semiconductor wafers
• Of machines for sawing monocrystal semiconductor boules into slices, or wafers into chips:
• 84869014 Tool holders and self-opening dieheads; work holders; dividing heads and other special attachments for machine-tools
• 84869015 Other
• 84869016 Of grinding, polishing and lapping machines for processing of semiconductor wafers
• 84869017 Of apparatus for growing or pulling monocrystal semiconductor boules
• 84869019 Other
• Of machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits:
• 84869021 Of chemical vapour deposition apparatus for semiconductor production
• 84869022 Of epitaxial deposition machines for semiconductor wafers; of spinners for coating photographic emulsions on semiconductor wafers
• 84869023 Of ion implanters for doping semiconductor materials; of apparatus for physical deposition by sputtering on semiconductor wafers; of physical deposition apparatus for semiconductor production; of direct write-on-wafer apparatus, step and repeat aligners and other lithography equipment
• Of spraying appliances for etching, stripping or cleaning semiconductor wafers; of apparatus for wet etching, developing, stripping or cleaning semiconductor wafers; of dry etching patterns on semiconductor materials:
• 84869024 Tool holders and self-opening dieheads; work holders; dividing heads and other special attachments for machine-tools
• 84869025 Other
• Of dicing machines for scribing or scoring semiconductor wafers; of lasercutters for cutting tracks in semiconductor production by laser beam; of machines for bending, folding and straightening semiconductor leads:
• 84869026 Tool holders and self-opening dieheads; workholders; dividing heads and other special attachments for machine-tools
• 84869027 Other
• 84869028 Of resistance heated furnaces and ovens for the manufacture of semiconductor devices on semiconductor wafers; of inductance or dielectric furnaces and ovens for the manufacture of semiconductor devices on semiconductor wafers
• 84869029 Other
• Of machines and apparatus for the manufacture of flat panel displays:
• 84869031 Of apparatus for dry etching patterns on flat panel display substrates
• Of apparatus for wet etching, developing, stripping or cleaning flat panel displays:
• 84869032 Tool holders and self-opening dieheads; work holders; dividing heads and other special attachments for machine-tools
• 84869033 Other
• 84869034 Of chemical vapour deposition apparatus for flat panel display production
• 84869035 Of spinners for coating photosensitive emulsions on flat panel display substrates
• 84869036 Of apparatus for physical deposition on flat panel display substrates
• 84869039 Other
• Of machines or apparatus specified in Note 11 (C) to this Chapter:
• 84869041 Of focused ion beam milling machines to produce or repair masks and reticles for patterns on semiconductor devices
• 84869042 Of die attach apparatus, tape automated bonders, wire bonders and of encapsulation equipment for assembly of semiconductors
• 84869043 Of automated machines for the transport, handling and storage of semiconductor wafers, wafer cassettes, wafer boxes and other materials for semiconductor devices
• 84869044 Of optical stereoscopic and photomicrographic microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles
• 84869045 Of electron beam microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles
• 84869046 Of pattern generating apparatus of a kind used for producing masks or reticles from photoresist coated substrates, including printed circuit assemblies
• 84869049 Other