Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines and apparatus specified in Note 11 (C) to this Chapter; parts and accessories
848620Subheading
8486.20 — Machines and apparatus for the manufacture of semiconductor devices or of electronic integrated circuits:
Máy và thiết bị để sản xuất linh kiện bán dẫn hoặc mạch điện tử tích hợp:
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Codes under heading 848620
- Film formation equipment:
- 84862011 Chemical vapour deposition apparatus for semiconductor production
- 84862012 Epitaxial deposition machines for semiconductor wafers; spinners for coating photographic emulsions on semiconductor wafers
- 84862013 Apparatus for physical deposition by sputtering on semiconductor wafers; physical deposition apparatus for semiconductor production
- 84862019 Other
- Doping equipment:
- 84862021 Ion implanters for doping semiconductor materials
- 84862029 Other
- Etching and stripping equipment:
- 84862031 Deflash machines for cleaning and removing contaminants from the metal leads of semiconductor packages prior to the electroplating process; spraying appliances for etching, stripping or cleaning semiconductor wafers
- 84862032 Equipment for dry etching patterns on semiconductor materials
- 84862033 Apparatus for wet etching, developing, stripping or cleaning semiconductor wafers
- 84862039 Other
- Lithography equipment:
- 84862041 Direct write-on-wafer apparatus
- 84862042 Step and repeat aligners
- 84862049 Other
- Equipment for developing exposed wafers:
- 84862051 Dicing machines for scribing or scoring semiconductor wafers
- 84862059 Other
- Other:
- 84862091 Lasercutters for cutting contacting tracks in semiconductor production by laser beam
- 84862092 Machines for bending, folding and straightening semiconductor leads
- 84862093 Resistance heated furnaces and ovens for the manufacture of semiconductor devices on semiconductor wafers
- 84862094 Inductance or dielectric furnaces and ovens for the manufacture of semiconductor devices on semiconductor wafers
- 84862095 Automated machines for the placement or the removal of components or contact elements on semiconductor materials
- 84862099 Other
Data updated: 11/08/2026 · Found wrong or missing data? Report a data error